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Nature·4 min read·hard

Reprogrammable MEMS-based fabry-perot pixel photomask

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Islam, Md Iftekharul
Reprogrammable MEMS-based fabry-perot pixel photomask
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Researchers have demonstrated a reprogrammable MEMS-based Fabry–Perot pixel photomask that allows for adaptive lithography in standard semiconductor manufacturing. This technology enables precise dose modulation and could potentially accelerate the development cycle for new microelectronic circuits.

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Scientific Reports ( 2026 ) Cite this article

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